National Institute of Advanced Industrial Science and Technology Tsukuba West Super Clean Room
| Name | National Institute of Advanced Industrial Science and Technology Tsukuba West Super Clean Room |
|---|---|
| Facility Application | Factories/Laboratories |
| Address | Tskuba City, Ibaraki Prefecture |
| Completion Date | March 2002 |
| Features | The National Institute of Advanced Industrial Science and Technology (AIST) laboratory is used for the world's most advanced semiconductor research and development, and is also used for collaborative research with universities and companies. Floor area 3,000 m2/Cleanness class 3 (JIS standard B9920)/Temperature 23±1℃/Humidity 45%±5%/The FFU unidirectional flow method research environment is kept constant at all times. |