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Mitsubishi Electric Corporation Power Device Works, Kumamoto Works – Shisui Plant

Name Mitsubishi Electric Corporation Power Device Works, Kumamoto Works – Shisui Plant
Facility ApplicationFactory/Laboratory
Location Kikuchi City, Kumamoto Prefecture, Japan
Completion DateSeptember 2025
FeaturesThis is the new wefer plant for the production of state of the art silicon carbide (SiC) power semiconductors, which is used in the broad fields such as electric vehicles, home appliances, industrial equipments, etc. 8-inch (Approx. 200mm) SiC wafer will be produced in a large scale cleanroom.
We provided construction of cleanroom and its related facilities with installing our proprietary “TCR-SWIT®” system (Swirl Inducing-Type Stratified Air Conditioning Systems for Clean Rooms). Reduction of environmental footprint and energy consumption are both achieved by the system with highly ensured waste heat recovery.